Dingyi Technology takes you to understand the composition and structure of the vacuum coating machine

Vacuum coating machine technology has become an indispensable part of people's lives and affects people's lifestyles. For example, in daily life, the surfaces of tableware, home furnishing, building materials, electronic products, packaging, etc. are coated with a layer of film, which changes The performance of the product also changes its aesthetics.

         With the progress of society, vacuum coating machine technology is also changing with each passing day. Optical coating technology, winding coating technology, decorative coating technology, and magnetron coating technology have already been put into market use in large quantities to meet the current market demand. Many people outside the industry have a doubt in their hearts, that is, what are the specific structures of the vacuum coating machine? The following Huicheng Vacuum editor has compiled information in this area for your reference and study.

         1. Vacuum chamber, coating equipment mainly includes continuous coating production line and single-chamber coating machine, made of stainless steel, argon arc welding, chemical polishing treatment on the surface, and flanges of various specifications are welded on the vacuum chamber components interface.

         2. Vacuum acquisition part. In vacuum technology, the vacuum acquisition part is an important part. The acquisition of vacuum cannot be achieved by one vacuum equipment and method, and several pumps must be used in combination, such as mechanical pumps, Roots pumps, molecular pump systems, etc.

         3. Vacuum measurement part, the vacuum measurement part of the vacuum system is to measure the pressure in the vacuum chamber. Like a vacuum pump, there is no vacuum gauge that can measure the entire vacuum range, so people have made many types of vacuum gauges according to different principles and requirements. Such as thermocouple meter, ionization meter, Pirani meter and so on.

         4. For the power supply part, the target power supply mainly includes DC power supply, intermediate frequency power supply, pulse power supply, and radio frequency power supply (RF). Common power supply manufacturers include AE, ADL, Höttinger, etc.

         5. Process gas input system, process gases, such as argon (Ar), krypton (Kr), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., generally All are supplied by gas cylinders, through gas pressure reducing valve, gas stop valve, pipeline, gas flow meter, solenoid valve, piezoelectric valve, and then into the vacuum chamber. The advantage of this gas input system is that the pipeline is simple and clear, and it is easy to maintain or replace the gas cylinder. Each coating machine does not affect each other. There are also cases where multiple coating machines share a group of gas cylinders, which may be seen in some larger coating workshops. Its advantage is that it reduces the gas cylinder occupancy, unified planning, and unified layout. The disadvantage is that due to the increase in joints, the chance of air leakage increases. Moreover, the coating machines will interfere with each other, and the pipeline leakage of one coating machine may affect the product quality of other coating machines. In addition, when replacing gas cylinders, it is necessary to ensure that all machines are in a non-gas state.

         6. For the mechanical transmission part, the coating requires that the surrounding area must be uniform in thickness. Therefore, there must be three rotations during the coating process to meet the requirements. That is to say, while the large workpiece table is required to rotate (I), the small workpiece carrier also rotates (II), and the workpiece itself can also rotate (III) at the same time. In terms of mechanical design, there is generally a large driving gear in the center of the bottom of the large workpiece turntable, surrounded by some small planetary wheels meshing with it. If the product is to be rotated, the workpiece is generally rotated with a fork.

         7. Heating and temperature measurement Part of the coating equipment generally has heaters in different positions, and the temperature is measured and controlled by thermocouples. However, since the thermocouple clamp is located at a different location than the workpiece, the temperature reading may not be the true temperature of the workpiece. In order to measure the true temperature of the workpiece, there are many methods, such as installing a high temperature test paper or a thermocouple meter on the workpiece.

 
         8. Ion evaporation and sputtering source. The evaporation source of multi-arc plating is generally in the shape of a round cake, commonly known as a round cake target, and there are also rectangular multi-arc targets. A magnet is installed in the target seat, and the moving speed and trajectory of the arc spot can be adjusted by changing the magnetic field strength by moving the magnet forward and backward. In order to reduce the temperature of the target and the target base, the cooling water should be continuously fed into the target base. In order to ensure high electrical and thermal conductivity between the target and the target holder, a tin gasket can also be added between the target and the target holder. Magnetron sputtering coating generally adopts rectangular or cylindrical sputtering cathodes.

         9. The water cooling system is generally composed of a cooling tower, ice water machine, water pump, etc.

         The vacuum coating machine must be composed of the above nine components, and each component plays a vital role in the machine, and they are indispensable.